Riam rooj vag valve

Hla-flow siab regulating valve lug yog txaus nyiam rau high-flow siab tswj daim ntaub ntawv vim qhov txo actuation quab yuam yuav tsum tau thiab txo cov ntaus ntawv hneev taw cheeb tsam. Lub riam rooj vag valve tau tsim, tswj qhov ntws ntawm 1.3 Nl / min ntawm qhov khoom siab ntawm 1.5 bar. Lub valve yog micro fabricated siv sib sib zog nqus reactive ion etching (DRIE) thiab silicon fusion bonding. Kev siv micro machined riam rooj vag li qub hauv kev tswj lub siab ua kom muaj kev ua tau zoo thiab kev txuag nqi tuaj yeem ua tiav.